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PhD Studies in Electrical Engineering, Physics – Eindhoven, The Netherlands

Eindhoven University of Technology (TU/e)

The Netherlands

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Nov 15, 2021 23:59 (GMT +2)

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Department of Electrical Engineering seeks PhD in surface charging of electrostatic wafer clamps in EUV photolithography at the Eindhoven University (TU/e), The Netherlands – Nov 2021

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General Info

Position: PhD
No. of Positions: 1
Research Field: ,
Deadline to Apply: November 15, 2021(GMT +2)
Joining Date: -
Contract Period: Not Mentioned
Salary: According to Standard Norms

Department of Electrical Engineering
Eindhoven University of Technology (TU/e)

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Qualification Details

  • A master’s degree (or an equivalent university degree) and an excellent academic record in <physics and/or electrical engineering>.
  • A research oriented strong attitude towards experimental physics or electrical engineering with a focus on plasma physics and/or high voltage technology.
  • Ability to work in a team and <interested in collaborating with the industrial partners>.
  • Fluent in spoken and written English.

Responsibilities/Job Description

In EUV-photolithography tools, wafers are temporarily fixed to the wafer stage by means of electrostatic clamping. Such clamping is required to fixate the wafer at nanometer precision such that the photolithographic patterns can be applied with similar precision.

However, it is often observed that residual charge accumulation on the electrostatic clamp insulating surface can lead to unstable clamping force. Over time this effect negatively affects machine performance. This unwanted effect is also a limiting factor for future development where higher clamping forces are required.

In this research project we aim to characterize the exact influence of possible surface charge sources and define possible mitigation methods. This will be done with experiments on a model system combined with theoretical knowledge of charging processes, thereby laying a scientifically sound basis for future prevention of (uncontrolled) charging of insulator surface. These mitigation methods may be adapted to other related high-tech equipment where similar surface charging phenomenon occur.

Research questions which we will answer in this project are:

1. Which of the possible charging mechanisms are dominant in the surface charging of wafer stages?2. What ways are there to diminish or control these dominant mechanisms?3. Are there ways to make a surface more robust against (unpredictable) surface charging4. Are there ways to (easily) remove surface charges in situ?

How to Apply?

Online Application through "Apply Now" Button from this page or from advertisement webpage (URL below)

Reference Number: -V36.5169
(If any, use it in the necessary place)

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Documents Required

The application should include a:

  • Cover letter in which you describe your motivation and qualifications for the position.
  • Curriculum vitae, including a list of your publications and the contact information of three references.
  • Brief description of your MSc thesis.

We look forward to your application and will screen it as soon as we have received it.Screening will continue until the position has been filled.

Please keep in mind you can upload only 5 documents up to 2 MB each. If necessary please combine files.

About the Employer: Eindhoven University of Technology (TU/e)

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Contact details

Please contact A.J.M. Pemen, chair group Electrical Energy Systems, a.j.m.pemen[at]].

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